ICS 31.080 H 80/84 团体 标准 T/CASA S 009—2019 半绝缘碳化硅材料中痕量杂质浓度及分布的二次 离子质谱检测方法 Determination of Trace Impurities Concentration and Distribution in Semi -insulating SiC Materials by Secondary Ion Mass Spe ctrometry 版本：V01.00 2019-11-25发布 2019-11-25实施 第三代半导体产业技术创新战略联盟 发布 全国团体标准信息平台 全国团体标准信息平台 T/CASA S 009-2019 I 目 录 前 言 ................................ ................................ ................................ ................................ ............................... I 1 范围 ................................ ................................ ................................ ................................ .............................. 1 2 规范性引用文件 ................................ ................................ ................................ ................................ .......... 1 3 术语和定义 ................................ ................................ ................................ ................................ .................. 1 4 方法原理 ................................ ................................ ................................ ................................ ...................... 1 5 干扰因素 ................................ ................................ ................................ ................................ ...................... 2 6 仪器及设备 ................................ ................................ ................................ ................................ .................. 2 6.1 质量分析器 ................................ ................................ ................................ .............................. 2 6.2 进样系统及控制台 ................................ ................................ ................................ .................. 2 6.3 真空系统 ................................ ................................ ................................ ................................ .. 2 7 试样准备 ................................ ................................ ................................ ................................ ...................... 3 7.1 标准样品 ................................ ................................ ................................ ................................ .. 3 7.2 空白样品 ................................ ................................ ................................ ................................ .. 3 7.3 测试样品 ................................ ................................ ................................ ................................ .. 3 8 操作步骤 ................................ ................................ ................................ ................................ ...................... 3 8.1 样品装载 ................................ ................................ ................................ ................................ .. 3 8.2 仪器调试 ................................ ................................ ................................ ................................ .. 3 8.3 分析条件 ................................ ................................ ................................ ................................ .. 3 8.4 样品分析 ................................ ................................ ................................ ................................ .. 3 9 结果计算 ................................ ................................ ................................ ................................ ...................... 4 9.1 相对灵敏度因子的计算 ................................ ................................ ................................ .......... 4 9.2 痕量杂质浓度的计算 ................................ ................................ ................................ .............. 4 10重复性和准确度 ................................ ................................ ................................ ................................ ......... 5 11 报告 ................................ ................................ ..................